형상측정기
| Control system | Contorur Measuring Instrument |
| Measuring range | 100mm (X axis) 800㎛, 80㎛, 8㎛ (Z1 axis) |
| Measuring speed | 0.02 ~ 20mm/s |
| Measuring method | Skidless / skidded measurement |
| Drive unit | Auto Pneumati Actuator |
| Measuring force | 0.75mN / 4mN |
| Resolution | 0.01㎛ / 0.01㎛ / 0.0001㎛ |
| Stylus tip radius | R=2㎛ 60° L*5.2mm
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