천일엔지니어링

CHUNIL ENGINEERING

형상측정기

Control system Contorur Measuring Instrument
Measuring range 100mm (X axis)
800㎛, 80㎛, 8㎛ (Z1 axis)
Measuring speed 0.02 ~ 20mm/s
Measuring method Skidless / skidded measurement
Drive unit Auto Pneumati Actuator
Measuring force 0.75mN / 4mN
Resolution 0.01㎛ / 0.01㎛ / 0.0001㎛
Stylus tip radius R=2㎛ 60° L*5.2mm